Volume : II, Issue : VI, June - 2013
A Comparative Study of ECR Based Chemically Assisted Plasma Etching of GaAs and Si
Ashutosh Bilves, R K Bhardwaj
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DOI : https://www.doi.org/10.36106/paripex
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A COMPARATIVE STUDY OF ECR BASED CHEMICALLY ASSISTED PLASMA ETCHING OF GAAS AND SI, Ashutosh Bilves, R K Bhardwaj PARIPEX-INDIAN JOURNAL OF RESEARCH : Volume-2 | Issue-6 | June-2013
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A COMPARATIVE STUDY OF ECR BASED CHEMICALLY ASSISTED PLASMA ETCHING OF GAAS AND SI, Ashutosh Bilves, R K Bhardwaj PARIPEX-INDIAN JOURNAL OF RESEARCH : Volume-2 | Issue-6 | June-2013