Volume : IV, Issue : X, October - 2015

Deposition of Thin Films by Physical and Chemical Process

Dr. Mahendra Kumar

Abstract :

This paper have several important aspects and techniques about thin film deposition process have been presented such as a ief overview of PVD process, types of PVD system that are thermal evaporation and sputtering, a ief overview of CVD process. The study and development of thin films via physical vapour deposition has played a significant role in the development of optical coatings, semiconductors, and solar cells. A detailed explanation of the development and operation as well as future improvements that were made.

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Article: Download PDF   DOI : 10.36106/ijsr  

Cite This Article:

Dr. Mahendra Kumar Deposition of Thin Films by Physical and Chemical Process International Journal of Scientific Research, Vol : 4, Issue : 10 October 2015

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