Volume : III, Issue : XII, December - 2013

Characterization of MEMS Three–Direction Capacitive Accelerometer

Mrs. Anitha Bontha, Mr. Amit Kumar Sinha, Mr. Shailendra Kumar Mishra, Mr. Gaddam Vinay

Abstract :

In this project we present the design and faication of a MEMS three–direction capacitive accelerometer. The design of the motion sensor includes sensing acceleration in the x–, y–, and z– directions, tilting, and free–fall. This device achieves this function implementing four serpentine spring systems suspending a proof–mass. The structure of the sensor can then be modeled as a mechanical mass–spring system where the mass is one side of a parallel plate capacitor and the frame of the accelerometer is the other. The device then has a nominal capacitance and will change as the proof–mass responds to acceleration events. These changes can be monitored along each axis and then analyzed to provide information on the motion occurring. The design features a proof–mass with interdigitated fingers along each side that correspond to interdigitated fingers extending from the frame. This structure then creates many small Parallel plate capacitors that will sense motions in–plane with the x– and y– axes. Beneath the Proof–mass, separated by an air gap, is the bottom electrode acting as one parallel plate of the Differential capacitor sensing along the z–axis.  

Keywords :

Article: Download PDF   DOI : 10.36106/ijar  

Cite This Article:

Mrs. Anitha Bontha, Mr. Amit Kumar Sinha, Mr. Shailendra Kumar Mishra, Mr. Gaddam Vinay Characterization of MEMS Three-Direction Capacitive Accelerometer Indian Journal of Applied Research, Vol.III, Issue.XII Dec 2013

Number of Downloads : 952

References :